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free,30-Day Returns
Seller Store semiconductorpartsdepot
(91) 100.0%,
Location: Hillsboro, Oregon
Ships to: US,
Item: 145671695194
Return shipping will be paid by:Buyer
All returns accepted:Returns Accepted
Item must be returned within:30 Days
Refund will be given as:Money Back
Return policy details:
Horiba:Horiba
Category:Vacuum Cryogenics and Flow Control
Port Diameter:1.125 in IGS
Maximum Flow Rate:200CCM
MPN:Criterion D500
Country/Region of Manufacture:Japan
Unit Quantity:1
Gas Media:CH3F [Fluoromethane],SO2 [Sulfur Dioxide]
This is a used MFC controller that is fully operational and in good working order. It came of a dry etcher that was getting process gas upgrades for new etching process recipes. This MFC has been purged with argon (Ar) gas prior to removal of tool to ensure safety and handling. If there are any problems with this unit, please don’t hesitate to send us a message so we can remedy the situation with a return/refund. We want to provide our customers with the best service and parts. We buy our inventory from local precision manufacturers within the semiconductor community to ensure quality and OEM performance standards. For custom quantities, please send us a message inquiry and we can get you a quote. If there are any issues with your order, please reach out and we will be glad to help. CRITERION D500Pressure Insensitive Mass Flow ModuleThis leading-edge pressure insensitive mass flow module is installed with differential pressure detection and a piezo actuator valve.The high level of performance provided by the CRITERION D500 ensures it can be used for a range of advanced semiconductor manufacturing processes; pressure insensitive, multi-range/multi-gas/multi-pressure, G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and all-metal. Pressure Insensitive PerformanceA new high-performance Pressure Insensitive function provides a simplified gas supply system Multi-range, multi-gas, multi-pressure solutionThe new functions allow the user to change gas type, Full-scale flow rate, and supply pressure range G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis functionThe advanced process health monitoring function allows operators to conduct their own tests, typically in three seconds or less for improved throughput High AccuracyFlow rate accuracy for process gas has been improved with an advanced three-dimensional adjustment Fast ResponseResponse: < 0.8 secondAccurate, stable flow control can be achieved Dynamic RangeWide control range: 0.2% F.S. to 100% F.S.
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